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Evaluation of Young's Modulus and Residual Stress of NiFe Film by Microbridge Testing 期刊论文
Journal of Materials Science & Technology, 2006, 卷号: 22, 期号: 3, 页码: 345-348
Authors:  ZHOU Zhimin;  Yong ZHOU;  Zhang TH(张泰华);  Zhou, Y (reprint author), Shanghai Jiao Tong Univ, Key Lab Thin Film & Microfabricat Technol, Minist Educ, Res Inst Micro Nanometer Sci & Technol, Shanghai 200030, Peoples R China.
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