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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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周勇 [1]
周志敏 [1]
张亚民 [1]
张泰华 [1]
杨春生 [1]
王明军 [1]
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2004 [1]
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中文 [1]
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电子元件与材料 [1]
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Creator:张泰华
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Date Issued:2004
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微桥法镍膜的弹性模量和残余应力测量
期刊论文
电子元件与材料, 2004, 卷号: 23, 期号: 12, 页码: 13-16
Authors:
王明军
;
周勇
;
陈吉安
;
杨春生
;
张亚民
;
高孝裕
;
周志敏
;
张泰华
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Submit date:2010/05/03
材料测量与分析技术
镍膜微桥
Mems技术
弹性模量
残余应力