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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
Creator
张泰华 [1]
张海霞 [1]
郇勇 [1]
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Journal ar... [1]
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2003 [1]
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中文 [1]
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微纳电子技术 [1]
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973项目 (G19... [1]
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Creator：郇勇
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Funding Organization：973项目 (G19990 3 3 10 9)
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纳米压痕和划痕法测定氧化硅薄膜材料的力学特性
期刊论文
微纳电子技术, 2003, 期号: 7-8, 页码: 245-248
Authors:
张海霞
;
张泰华
;
郇勇
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Submit date：2010/05/03
纳米压痕
纳米划痕
力学特性
氧化硅
热氧化
Lpcvd
Pecvd
