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Dual confocal laser-induced fluorescence/moveable contactless 期刊论文
Microsyst. Technol., 2009, 卷号: 15, 期号: 6, 页码: 881–885
作者:  Shen F(申峰);  Yu Y(于泳);  Yang M(杨萌);  Kang Q(康琦);  Yong Yu
Adobe PDF(253Kb)  |  收藏  |  浏览/下载:842/181  |  提交时间:2009/12/14
Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
作者:  张吟
Adobe PDF(555Kb)  |  收藏  |  浏览/下载:531/157  |  提交时间:2007/06/15