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Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip 期刊论文
Journal of Applied Mechanics-Transactions of the ASME, 2008
作者:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Adobe PDF(642Kb)  |  收藏  |  浏览/下载:1293/353  |  提交时间:2009/08/03
Compressed Elastic Film  Thin-films  Viscous Layer  Wafer Fusion  Stress  Beam  Semiconductors  Technology  Extension  Adhesion  
Static Study of Cantilever Beam stiction under Electrostatic Force Influence 期刊论文
Acta Mechanica Solida Sinica, 2004, 卷号: 17, 期号: 2, 页码: 104-112
作者:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Univ Connecticut, Dept Mech Engn, Storrs, CT 06268 USA.
Adobe PDF(313Kb)  |  收藏  |  浏览/下载:722/181  |  提交时间:2007/06/15