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硅生长过程中尖形磁场对流场及提拉速率的影响 期刊论文
力学与实践, 2009, 卷号: 31, 期号: 4, 页码: 24-27
作者:  陈启生;  秦明;  邓谷雨
Adobe PDF(484Kb)  |  收藏  |  浏览/下载:469/80  |  提交时间:2010/05/03
提拉法  单晶硅  流动振荡  提拉速率  
Progress In Modeling Of Fluid Flows In Crystal Growth Processes 期刊论文
Progress In Natural Science, 2008, 页码: 1465-1473
作者:  Chen QS(陈启生);  Jiang YN(姜燕妮);  Yan JY(颜君毅);  Qin M(秦明)
Adobe PDF(423Kb)  |  收藏  |  浏览/下载:1031/261  |  提交时间:2009/08/03
Modeling  Crystal Growth  Fluid Flow  Czochralski Growth  Ammonothermal Growth  Physical Vapor Transport  Transverse Magnetic-field  Physical-vapor Transport  Sic-bulk Growth  Silicon Czochralski Furnace  Thermal-capillary Analysis  Radiative Heat-transfer  Sublimation Growth  Numerical-simulation  Ammonothermal Growth  Oxygen Distribution