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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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李帅辉 [1]
樊菁 [1]
舒勇华 [1]
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Journal ar... [1]
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2008 [1]
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中文 [1]
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中国科学. E辑, ... [1]
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Source Publication：中国科学. E辑, 技术科学
Creator：舒勇华
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电子束物理气相沉积钇钛合金薄膜的组分和厚度分布
期刊论文
中国科学. E辑, 技术科学, 2008, 卷号: 38, 期号: 7, 页码: 1105-1117
Authors:
李帅辉
;
舒勇华
;
樊菁
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Submit date：2010/05/03
电子束物理气相沉积
薄膜
厚度和组分分布
蒸气原子
非平衡输运
