Knowledge Management System of Institue of Mechanics, CAS
| An Effective Method of Determining the Residual Stress Gradients in a Micro-Cantilever | |
Zhang Y(张吟) ; Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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| Source Publication | Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
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| 2006 | |
| Volume | 12Issue:4Pages:357-364 |
| ISSN | 0946-7076 |
| Abstract | A method of determining the micro-cantilever residual stress gradients by studying its deflection and curvature is presented. The stress gradients contribute to both axial load and bending moment, which, in prebuckling regime, cause the structural stiffness change and curving up/down, respectively. As the axial load corresponds to the even polynomial terms of stress gradients and bending moment corresponds to the odd polynomial terms, the deflection itself is not enough to determine the axial load and bending moment. Curvature together with the deflection can uniquely determine these two parameters. Both linear analysis and nonlinear analysis of micro-cantilever deflection under axial load and bending moment are presented. Because of the stiffening effect due to the nonlinearity of (large) deformation, the difference between linear and nonlinear analyses enlarges as the micro-cantilever deflection increases. The model developed in this paper determines the resultant axial load and bending moment due to the stress gradients. Under proper assumptions, the stress gradients profile is obtained through the resultant axial load and bending moment. |
| Subject Area | 力学 |
| DOI | 10.1007/s00542-005-0065-z |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000235574100011 |
| WOS Keyword | THIN-FILMS ; MICROMACHINED BEAMS ; INSITU MEASUREMENT ; SILICON FILMS ; STRAIN ; POLYSILICON ; ACCURATE |
| WOS Research Area | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/16656 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Zhang Y,Zhao YP,Zhao, YP . An Effective Method of Determining the Residual Stress Gradients in a Micro-Cantilever[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2006,12,4,:357-364. |
| APA | 张吟,赵亚溥,&Zhao, YP .(2006).An Effective Method of Determining the Residual Stress Gradients in a Micro-Cantilever.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,12(4),357-364. |
| MLA | 张吟,et al."An Effective Method of Determining the Residual Stress Gradients in a Micro-Cantilever".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 12.4(2006):357-364. |
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