Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators

doi:10.1109/JMEMS.2004.838390

IMECH-IR > 力学所知识产出(1956-2008)

	Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators
	Guo JG(郭建刚); Zhao YP(赵亚溥); Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
发表期刊	Journal of Microelectromechanical Systems
	2004
卷号	13 期号:6 页码:1027-1035
ISSN	1057-7157
摘要	The influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. And the influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived.
学科领域	力学
DOI	10.1109/JMEMS.2004.838390
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000225515100017
关键词[WOS]	PULL-IN ; DYNAMIC-BEHAVIOR ; MEMS ; MODEL ; MICROMIRRORS ; SWITCH
WOS研究方向	Engineering
WOS类目	Engineering, Electrical & Electronic ; Engineering, Mechanical
引用统计	被引频次：132[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/17103
专题	力学所知识产出(1956-2008)
通讯作者	Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Guo JG,Zhao YP,Guo, JG . Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators[J]. Journal of Microelectromechanical Systems,2004,13,6,:1027-1035.
APA	郭建刚,赵亚溥,&Guo, JG .(2004).Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators.Journal of Microelectromechanical Systems,13(6),1027-1035.
MLA	郭建刚,et al."Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators".Journal of Microelectromechanical Systems 13.6(2004):1027-1035.

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