Micro-Scale Gas Flows

IMECH-IR > 力学所知识产出(1956-2008)

	Micro-Scale Gas Flows
	Fan J(樊菁); Shen Q(沈青)
Source Publication	力学进展
	2002
Volume	32 Issue:3 Pages:321-336
ISSN	1000-0992
Other Abstract	了解微尺度气体流动特点是微机电系统设计和优化的基础.有关的研究可以上溯到20世纪初Knudsen的平面槽道流动质量流量的测量和Millikan的小球阻力系数的测量,实验结果揭示了稀薄气体效应即尺度效应对气体运动的重要影响.由于流动特征长度很小,微尺度气流经常处于滑流区甚至过渡领域,流动的相似参数为Knudsen数和Mach数.因此可以考虑利用相似准则,通过增大几何尺寸、减小压力的途径,解决微机电系统实验观测遇到的困难.为解决直接模拟MonteCarlo方法分析微机电系统中低速稀薄气流遇到的统计涨落困难,我们提出了信息保存法(IP),该方法能够有效克服统计散布,并已成功用于多种微尺度气流.
Subject Area	力学
Indexed By	其他
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/17188
Collection	力学所知识产出(1956-2008)
Recommended Citation GB/T 7714	Fan J,Shen Q. Micro-Scale Gas Flows[J]. 力学进展,2002,32,3,:321-336.
APA	樊菁,&沈青.(2002).Micro-Scale Gas Flows.力学进展,32(3),321-336.
MLA	樊菁,et al."Micro-Scale Gas Flows".力学进展 32.3(2002):321-336.

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