Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si

IMECH-IR > 力学所知识产出(1956-2008)

	Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si
	Hu YQ(胡宇群); Zhao YP(赵亚溥); Yu TX(余同希); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
发表期刊	International Journal of Nonlinear Sciences and Numerical Simulation
	2008
页码	315-322
ISSN	1565-1339
摘要	Anodic bonding of Pyrex glass/Al/Si is an important bonding technique in micro/nanoelectromechanical systems (MEMS/NEMS) industry. The anodic bonding of Pyrex 7740 glass/Aluminum film/Silicon is completed at the temperature from 300 degrees C to 375 degrees C with a bonding voltage between 150 V and 450 V. The fractal patterns are formed in the intermediate Al thin film. This pattern has the fractal dimension of the typical two-dimensional diffusion-limited aggregation (2D DLA) process, and the fractal dimension is around 1.7. The fractal patterns consist of Al and Si crystalline grains, and their occurrences are due to the limited diffusion, aggregation, and crystallization of Si and Al atoms in the intermediate Al layers. The formation of the fractal pattern is helpful to enhance the bonding strength between the Pyrex 7740 glass and the aluminum thin film coated on the crystal silicon substrates.
关键词	Fractal Pattern Dla Anodic Bonding Aluminum Interlayer Mems Diffusion-limited Aggregation Ion Drift Processes Borosilicate Glass Depletion Films Si
收录类别	SCI
语种	英语
WOS记录号	WOS:000260106100002
关键词[WOS]	DIFFUSION-LIMITED AGGREGATION ; ION DRIFT PROCESSES ; BOROSILICATE GLASS ; DEPLETION ; FILMS ; SI
WOS研究方向	Engineering ; Mathematics ; Mechanics ; Physics
WOS类目	Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25874
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
推荐引用方式 GB/T 7714	Hu YQ,Zhao YP,Yu TX,et al. Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2008:315-322.
APA	胡宇群,赵亚溥,余同希,&Zhao, YP .(2008).Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si.International Journal of Nonlinear Sciences and Numerical Simulation,315-322.
MLA	胡宇群,et al."Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si".International Journal of Nonlinear Sciences and Numerical Simulation (2008):315-322.

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