Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip

doi:10.1115/1.2745387

IMECH-IR > 力学所知识产出(1956-2008)

	Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip
	Zhang Y(张吟); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
发表期刊	Journal of Applied Mechanics-Transactions of the ASME
	2008
ISSN	0021-8936
摘要	The curvature-stress relation is studied for a film-substrate bilayer with the effect of interfacial slip and compared with that of an ideal interface without interfacial slip. The interfacial slip together with the dimensions, elastic and interfacial properties of the film and substrate layers can cause a significant deviation of curvature-stress relation from that with an ideal interface. The interfacial slip also results in the so-called free edge effect that the stress, constraint force, and curvature vary dramatically around the free edges. The constant curvature as predicted by Stoney's formula and the Timoshenko model of an ideal interface is no longer valid for a bilayer with a nonideal interface. The models with the assumption of an ideal interface can also lead to an erroneous evaluation on the true stress state inside a bilayer with a nonideal interface. The extended Stoney's formula incorporating the effects of both the layer dimensions and interfacial slip is presented.
关键词	Compressed Elastic Film Thin-films Viscous Layer Wafer Fusion Stress Beam Semiconductors Technology Extension Adhesion
DOI	10.1115/1.2745387
收录类别	SCI
语种	英语
WOS记录号	WOS:000255132400008
关键词[WOS]	COMPRESSED ELASTIC FILM ; THIN-FILMS ; VISCOUS LAYER ; WAFER FUSION ; STRESS ; BEAM ; SEMICONDUCTORS ; TECHNOLOGY ; EXTENSION ; ADHESION
WOS研究方向	Mechanics
WOS类目	Mechanics
引用统计	被引频次：16[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/26062
专题	力学所知识产出(1956-2008)
通讯作者	Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang Y,Zhang, Y . Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip[J]. Journal of Applied Mechanics-Transactions of the ASME,2008.
APA	张吟,&Zhang, Y .(2008).Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip.Journal of Applied Mechanics-Transactions of the ASME.
MLA	张吟,et al."Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip".Journal of Applied Mechanics-Transactions of the ASME (2008).

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