Knowledge Management System of Institue of Mechanics, CAS
| Materials selection in mechanical design for microsensors and microactuators | |
Qian J(钱劲) ; Zhao YP(赵亚溥)
| |
| Source Publication | Materials & Design
 |
| 2002 | |
| Volume | 23Issue:7Pages:619-632 |
| ISSN | 0261-3069 |
| Abstract | Microsensors and microactuators are vital organs of microelectromechanical systems (MEMS), forming the interfaces between controller and environment. They are usually used for devices ranging in size at sub-millimeter or micrometer level, transforming energy between two or more domains. Presently, most of the materials used in MEMS devices belong to the silicon material system, which is the basis of the integrated circuit industry. However, new techniques are being explored and developed, and the opportunities for MEMS materials selection are getting broader. The present paper tries to apply 'performance index' to select the material best suited to a given application, in the early stage of MEMS design. The selection is based on matching performance characteristics to the requirements. A series of performance indices are given to allow a wide range comparison of materials for several typical sensing and actuating structures, and a rapid identification of candidates for a given task. (C) 2002 Elsevier Science Ltd. All rights reserved. |
| Keyword | Microelectromechanical Systems Materials Selection Mechanical Design Performance Index Microsensors Microactuators Functionally Graded Materials Composites |
| DOI | 10.1016/S0261-3069(02)00051-1 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000179796000004 |
| WOS Keyword | FUNCTIONALLY GRADED MATERIALS ; COMPOSITES |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Multidisciplinary |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/33665 |
| Collection | 力学所知识产出(1956-2008) |
| Recommended Citation GB/T 7714 | Qian J,Zhao YP. Materials selection in mechanical design for microsensors and microactuators[J]. Materials & Design,2002,23,7,:619-632. |
| APA | 钱劲,&赵亚溥.(2002).Materials selection in mechanical design for microsensors and microactuators.Materials & Design,23(7),619-632. |
| MLA | 钱劲,et al."Materials selection in mechanical design for microsensors and microactuators".Materials & Design 23.7(2002):619-632. |
| Files in This Item: | Download All | |||||
| File Name/Size | DocType | Version | Access | License | ||
| E36.pdf（586KB） | 开放获取 | -- | View Download | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment