Materials selection in mechanical design for microsensors and microactuators

doi:10.1016/S0261-3069(02)00051-1

IMECH-IR > 力学所知识产出(1956-2008)

	Materials selection in mechanical design for microsensors and microactuators
	Qian J(钱劲); Zhao YP(赵亚溥)
发表期刊	Materials & Design
	2002
卷号	23 期号:7 页码:619-632
ISSN	0261-3069
摘要	Microsensors and microactuators are vital organs of microelectromechanical systems (MEMS), forming the interfaces between controller and environment. They are usually used for devices ranging in size at sub-millimeter or micrometer level, transforming energy between two or more domains. Presently, most of the materials used in MEMS devices belong to the silicon material system, which is the basis of the integrated circuit industry. However, new techniques are being explored and developed, and the opportunities for MEMS materials selection are getting broader. The present paper tries to apply 'performance index' to select the material best suited to a given application, in the early stage of MEMS design. The selection is based on matching performance characteristics to the requirements. A series of performance indices are given to allow a wide range comparison of materials for several typical sensing and actuating structures, and a rapid identification of candidates for a given task. (C) 2002 Elsevier Science Ltd. All rights reserved.
关键词	Microelectromechanical Systems Materials Selection Mechanical Design Performance Index Microsensors Microactuators Functionally Graded Materials Composites
DOI	10.1016/S0261-3069(02)00051-1
收录类别	SCI
语种	英语
WOS记录号	WOS:000179796000004
关键词[WOS]	FUNCTIONALLY GRADED MATERIALS ; COMPOSITES
WOS研究方向	Materials Science
WOS类目	Materials Science, Multidisciplinary
引用统计	被引频次：27[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/33665
专题	力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Qian J,Zhao YP. Materials selection in mechanical design for microsensors and microactuators[J]. Materials & Design,2002,23,7,:619-632.
APA	钱劲,&赵亚溥.(2002).Materials selection in mechanical design for microsensors and microactuators.Materials & Design,23(7),619-632.
MLA	钱劲,et al."Materials selection in mechanical design for microsensors and microactuators".Materials & Design 23.7(2002):619-632.

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