Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges

doi:10.1063/1.363319

IMECH-IR > 力学所知识产出(1956-2008)

	Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges
	Yang Y; Wu HM(吴汉明)
发表期刊	Journal of Applied Physics
	1996
卷号	80 期号:7 页码:3699-3704
ISSN	0021-8979
摘要	An efficient method for solving the spatially inhomogeneous Boltzmann equation in a two-term approximation for low-pressure inductively coupled plasmas has been developed. The electron distribution function (EDF), a function of total electron energy and two spatial coordinates, is found self-consistently with the static space-charge potential which is computed from a 2D fluid model, and the rf electric field profile which is calculated from the Maxwell equations. The EDF and the spatial distributions of the electron density, potential, temperature, ionization rate, and the inductive electric field are calculated and discussed. (C) 1996 American Institute of Physics.
关键词	Electron-distribution Function Rf Discharge Glow-discharge Plasma Sources
DOI	10.1063/1.363319
收录类别	SCI
语种	英语
WOS记录号	WOS:A1996VL80100013
关键词[WOS]	ELECTRON-DISTRIBUTION FUNCTION ; RF DISCHARGE ; GLOW-DISCHARGE ; PLASMA SOURCES
WOS研究方向	Physics
WOS类目	Physics, Applied
引用统计	被引频次：16[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/39102
专题	力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Yang Y,Wu HM. Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges[J]. Journal of Applied Physics,1996,80,7,:3699-3704.
APA	Yang Y,&吴汉明.(1996).Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges.Journal of Applied Physics,80(7),3699-3704.
MLA	Yang Y,et al."Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges".Journal of Applied Physics 80.7(1996):3699-3704.

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