A precise model for the shape of an adhered microcantilever

doi:10.1016/j.sna.2011.09.001

IMECH-IR > 非线性力学国家重点实验室

	A precise model for the shape of an adhered microcantilever
	Zhang Y(张吟); Zhao YP(赵亚溥); Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
发表期刊	Sensors and Actuators A-Physical
	2011
卷号	171 期号:2 页码:381-390
ISSN	0924-4247
摘要	A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh-Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like one with the increase of the beam length is shown by the new model. The (real) beam deflection given by this new model deviates more or less from either an arc-shape or an S-shape, which has significant impact on the interpretation of experimental data. The arc-shaped or S-shaped deflection assumption ignores the beam bending energy inside the contact area and the elastic energy due to the beam/substrate contact, which is inappropriate as shown by this study. Furthermore, the arc-shaped or S-shaped deflection only approximately describes the deflection shape of a stuck beam with zero external load and obviously, the external load changes the beam deflection. The Rayleigh-Ritz method using the arc-shaped or S-shaped deflection assumption in essence can only be used to tell approximately whether stiction occurs or not. Rather than assuming a certain deflection shape and by incorporating the external load, the new method offers a more general and accurate study not only on the microcantilever beam stiction but also on its de-adherence. (C) 2011 Elsevier B.V. All rights reserved.
关键词	Stiction Microcantilever Adhesion Arc-shape S-shape Finite Beam Adhesion Stiction Mems Contact Force Cantilevers Foundation Mechanics Work
学科领域	Engineering ; Instruments & Instrumentation
DOI	10.1016/j.sna.2011.09.001
URL	查看原文
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000297454400045
关键词[WOS]	FINITE BEAM ; ADHESION ; STICTION ; MEMS ; CONTACT ; FORCE ; CANTILEVERS ; FOUNDATION ; MECHANICS ; WORK
WOS研究方向	Engineering ; Instruments & Instrumentation
WOS类目	Engineering, Electrical & Electronic ; Instruments & Instrumentation
项目资助者	This work is supported by the National Natural Science Foundation of China (NSFC, Grant Nos. 10721202 and 10772180), Ministry of Science and Technology (MOST Grant No. 2010CB631004) and National Basic Research Program of China (973 Program, Grant No. 2007CB310500).
课题组名称	LNM纳/微系统力学与物理力学
论文分区	二类/Q1
引用统计	被引频次：16[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/44896
专题	非线性力学国家重点实验室
通讯作者	Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Zhang Y,Zhao YP,Zhang, Y . A precise model for the shape of an adhered microcantilever[J]. Sensors and Actuators A-Physical,2011,171,2,:381-390.
APA	张吟,赵亚溥,&Zhang, Y .(2011).A precise model for the shape of an adhered microcantilever.Sensors and Actuators A-Physical,171(2),381-390.
MLA	张吟,et al."A precise model for the shape of an adhered microcantilever".Sensors and Actuators A-Physical 171.2(2011):381-390.

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