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A precise model for the shape of an adhered microcantilever
Zhang Y(张吟); Zhao YP(赵亚溥); Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
Source PublicationSensors and Actuators A-Physical
2011
Volume171Issue:2Pages:381-390
ISSN0924-4247
AbstractA variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh-Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like one with the increase of the beam length is shown by the new model. The (real) beam deflection given by this new model deviates more or less from either an arc-shape or an S-shape, which has significant impact on the interpretation of experimental data. The arc-shaped or S-shaped deflection assumption ignores the beam bending energy inside the contact area and the elastic energy due to the beam/substrate contact, which is inappropriate as shown by this study. Furthermore, the arc-shaped or S-shaped deflection only approximately describes the deflection shape of a stuck beam with zero external load and obviously, the external load changes the beam deflection. The Rayleigh-Ritz method using the arc-shaped or S-shaped deflection assumption in essence can only be used to tell approximately whether stiction occurs or not. Rather than assuming a certain deflection shape and by incorporating the external load, the new method offers a more general and accurate study not only on the microcantilever beam stiction but also on its de-adherence. (C) 2011 Elsevier B.V. All rights reserved.
KeywordStiction Microcantilever Adhesion Arc-shape S-shape Finite Beam Adhesion Stiction Mems Contact Force Cantilevers Foundation Mechanics Work
Subject AreaEngineering ; Instruments & Instrumentation
DOI10.1016/j.sna.2011.09.001
URL查看原文
Indexed BySCI ; EI
Language英语
WOS IDWOS:000297454400045
WOS KeywordFINITE BEAM ; ADHESION ; STICTION ; MEMS ; CONTACT ; FORCE ; CANTILEVERS ; FOUNDATION ; MECHANICS ; WORK
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation
Funding OrganizationThis work is supported by the National Natural Science Foundation of China (NSFC, Grant Nos. 10721202 and 10772180), Ministry of Science and Technology (MOST Grant No. 2010CB631004) and National Basic Research Program of China (973 Program, Grant No. 2007CB310500).
DepartmentLNM纳/微系统力学与物理力学
Classification二类/Q1
Citation statistics
Cited Times:14[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/44896
Collection非线性力学国家重点实验室
Corresponding AuthorZhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Zhang Y,Zhao YP,Zhang, Y . A precise model for the shape of an adhered microcantilever[J]. Sensors and Actuators A-Physical,2011,171(2):381-390.
APA 张吟,赵亚溥,&Zhang, Y .(2011).A precise model for the shape of an adhered microcantilever.Sensors and Actuators A-Physical,171(2),381-390.
MLA 张吟,et al."A precise model for the shape of an adhered microcantilever".Sensors and Actuators A-Physical 171.2(2011):381-390.
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