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Temperature effect on elastic modulus of thin films and nanocrystals
Liang LH(梁立红); Li MZ(李美之); Qin FQ(秦福麒); Wei YG(魏悦广); Liang LH (reprint author), Chinese Acad Sci, Inst Mech, LNM, Beijing 100080, Peoples R China
Source PublicationPHILOSOPHICAL MAGAZINE
2013-02-01
Volume93Issue:6Pages:574-583
ISSN1478-6435
AbstractThe stability of nanoscale devices is directly related to elasticity and the effect of temperature on the elasticity of thin films and nanocrystals. The elastic instability induced by rising temperature will cause the failure of integrated circuits and other microelectronic devices in service. The temperature effect on the elastic modulus of thin films and nanocrystals is unclear although the temperature dependence of the modulus of bulk materials has been studied for over half a century. In this paper, a theoretical model of the temperature-dependent elastic modulus of thin films and nanocrystals is developed based on the physical definition of the modulus by considering the size effect of the related cohesive energy and the thermal expansion coefficient. Moreover, the temperature effect on the modulus of Cu thin films is simulated by the molecular dynamics method. The results indicate that the elastic modulus decreases with increasing temperature and the rate of the modulus decrease increases with reducing thickness of thin films. The theoretical predictions based on the model are consistent with the results of computational simulations, semi-continuum calculations and the experimental measurements for Cu, Si thin films and Pd nanocrystals.
KeywordCohesive Energy Nanocrystals Thermal Expansion Size Effect Vibration Entropy
Subject Area固体力学
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Indexed BySCI ; EI
Language英语
WOS IDWOS:000322305500001
Funding OrganizationNational Basic Research Program of China [2012CB937500]; National Natural Science Foundation of China [10802088, 10832008, 11023001, 11021262, 10932011, 91116003]; the Opening Fund of LNM
DepartmentLNM新型材料及结构的多尺度力学
Classification一类
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/46938
Collection非线性力学国家重点实验室
Corresponding AuthorLiang LH (reprint author), Chinese Acad Sci, Inst Mech, LNM, Beijing 100080, Peoples R China
Recommended Citation
GB/T 7714
Liang LH,Li MZ,Qin FQ,et al. Temperature effect on elastic modulus of thin films and nanocrystals[J]. PHILOSOPHICAL MAGAZINE,2013,93(6):574-583.
APA 梁立红,李美之,秦福麒,魏悦广,&Liang LH .(2013).Temperature effect on elastic modulus of thin films and nanocrystals.PHILOSOPHICAL MAGAZINE,93(6),574-583.
MLA 梁立红,et al."Temperature effect on elastic modulus of thin films and nanocrystals".PHILOSOPHICAL MAGAZINE 93.6(2013):574-583.
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