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Monte Carlo modeling of electron beam physical vapor deposition of yttrium
Fan J(樊菁); Boyd ID; Shelton C
Source PublicationJournal of Vacuum Science & Technology A
2000
Volume18Issue:6Pages:2937-2945
ISSN0022-5355
Abstract
As part of a study on the deposition of superconducting films of YBa2Cu3O7−δ, a three-dimensional electron beam physical vapor deposition process of yttrium in a vacuum chamber is investigated both computationally and experimentally. The numerical analysis employs the direct simulation Monte Carlo (DSMC) method. The experimental studies consist of atomic absorption spectra taken in the evaporated yttrium plume and deposited film thickness profiles. Some important modeling issues such as atomic collision cross sections for metal vapors and hyperfine electronic structure of the atomic absorption spectra are addressed. Film deposition thicknesses on the substrate and atomic absorption spectra given by the DSMC method and experiment are in excellent agreement. Collisions between the atoms are found to have a significant effect on the film growth rate and area of uniform deposition as the evaporation rate of yttrium increases. © 2000 American Vacuum Society.
Subject Area流体力学
DOI10.1116/1.1310656
URL查看原文
Indexed BySCI
Language英语
WOS IDWOS:000165388500043
WOS Research AreaMaterials Science ; Metallurgy & Metallurgical Engineering ; Mining & Mineral Processing
WOS SubjectMaterials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering ; Mining & Mineral Processing
Citation statistics
Cited Times:26[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/47175
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714
Fan J,Boyd ID,Shelton C. Monte Carlo modeling of electron beam physical vapor deposition of yttrium[J]. Journal of Vacuum Science & Technology A,2000,18(6):2937-2945.
APA 樊菁,Boyd ID,&Shelton C.(2000).Monte Carlo modeling of electron beam physical vapor deposition of yttrium.Journal of Vacuum Science & Technology A,18(6),2937-2945.
MLA 樊菁,et al."Monte Carlo modeling of electron beam physical vapor deposition of yttrium".Journal of Vacuum Science & Technology A 18.6(2000):2937-2945.
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