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Monte Carlo modeling of electron beam physical vapor deposition of yttrium | |
Fan J(樊菁); Boyd ID; Shelton C | |
Source Publication | Journal of Vacuum Science & Technology A |
2000 | |
Volume | 18Issue:6Pages:2937-2945 |
ISSN | 0022-5355 |
Abstract | As part of a study on the deposition of superconducting films of YBa2Cu3O7−δ, a three-dimensional electron beam physical vapor deposition process of yttrium in a vacuum chamber is investigated both computationally and experimentally. The numerical analysis employs the direct simulation Monte Carlo (DSMC) method. The experimental studies consist of atomic absorption spectra taken in the evaporated yttrium plume and deposited film thickness profiles. Some important modeling issues such as atomic collision cross sections for metal vapors and hyperfine electronic structure of the atomic absorption spectra are addressed. Film deposition thicknesses on the substrate and atomic absorption spectra given by the DSMC method and experiment are in excellent agreement. Collisions between the atoms are found to have a significant effect on the film growth rate and area of uniform deposition as the evaporation rate of yttrium increases. © 2000 American Vacuum Society. |
Subject Area | 流体力学 |
DOI | 10.1116/1.1310656 |
URL | 查看原文 |
Indexed By | SCI |
Language | 英语 |
WOS ID | WOS:000165388500043 |
WOS Research Area | Materials Science ; Metallurgy & Metallurgical Engineering ; Mining & Mineral Processing |
WOS Subject | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering ; Mining & Mineral Processing |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/47175 |
Collection | 力学所知识产出(1956-2008) |
Recommended Citation GB/T 7714 | Fan J,Boyd ID,Shelton C. Monte Carlo modeling of electron beam physical vapor deposition of yttrium[J]. Journal of Vacuum Science & Technology A,2000,18,6,:2937-2945. |
APA | 樊菁,Boyd ID,&Shelton C.(2000).Monte Carlo modeling of electron beam physical vapor deposition of yttrium.Journal of Vacuum Science & Technology A,18(6),2937-2945. |
MLA | 樊菁,et al."Monte Carlo modeling of electron beam physical vapor deposition of yttrium".Journal of Vacuum Science & Technology A 18.6(2000):2937-2945. |
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