IMECH-IR  > 高温气体动力学国家重点实验室
沉积温度对电子束物理气相沉积制备YBCO薄膜性能与结构的影响
王连红; 刘崇; 樊菁; 舒勇华; 李帅辉; 张俊; 马月芬
Source Publication中国力学大会——2013论文摘要集
2013
Conference Name中国力学大会——2013
Conference Date2013-08-19
Conference Place中国北京
Abstract采用力学研究所自主研制的多元电子束物理气相沉积系统两步法生长YBCO薄膜。所用衬底为{001}LaAlO_3(简称LAO)单晶,尺寸为15mm×15mm,厚度为0.5mm。蒸发源选用Y,BaF_2和Cu,其纯度均高于99%。电子束蒸镀时衬底温度分别为室温、300℃和600℃。研究了不同沉积温度对YBCO薄膜结构、表面形貌及超导性能的影响。X射线衍射(XRD)和扫描电镜
KeywordYbco 沉积温度 薄膜结构 性能与结构 超导性能 衬底温度 织构 表面形貌 蒸发源 电子束蒸镀 Xrd 自主研制 室温 单晶 两步法 力学研究 射线衍射 致密的 尺寸 纯度
DepartmentLHD微尺度和非平衡流动
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/48571
Collection高温气体动力学国家重点实验室
Recommended Citation
GB/T 7714
王连红,刘崇,樊菁,等. 沉积温度对电子束物理气相沉积制备YBCO薄膜性能与结构的影响[C],2013.
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