Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film

IMECH-IR > 力学所知识产出(1956-2008)

	Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film
	Hu YQ(胡宇群); Zhao YP(赵亚溥); Yu TX(余同希)
会议录名称	2005年纳米和表面科学与技术全国会议论文摘要集
	2005
会议名称	2005年纳米和表面科学与技术全国会议
会议日期	2005-09-01
会议地点	中国北京
摘要	Anodic bonding,with metal or alloy thin films as an intermediate layer,findsincreasing applications in micro/nano electromechanical systems(MEMS/NEMS).Atthe bonding temperature of 350℃,voltage of 400 V and duration of 30 minutes,theanodic bonding is completed between Pyrex glass and crystalline ...
关键词	Anodic Bonding Dendritic Nanostructures Depletion Layer Dla
语种	英语
文献类型	会议论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/55230
专题	力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Hu YQ,Zhao YP,Yu TX. Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film[C]2005年纳米和表面科学与技术全国会议论文摘要集,2005.