Knowledge Management System of Institue of Mechanics, CAS
Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film | |
Hu YQ(胡宇群)![]() ![]() | |
Source Publication | 2005年纳米和表面科学与技术全国会议论文摘要集 |
2005 | |
Conference Name | 2005年纳米和表面科学与技术全国会议 |
Conference Date | 2005-09-01 |
Conference Place | 中国北京 |
Abstract | Anodic bonding,with metal or alloy thin films as an intermediate layer,findsincreasing applications in micro/nano electromechanical systems(MEMS/NEMS).Atthe bonding temperature of 350℃,voltage of 400 V and duration of 30 minutes,theanodic bonding is completed between Pyrex glass and crystalline ... |
Keyword | Anodic Bonding Dendritic Nanostructures Depletion Layer Dla |
Language | 英语 |
Document Type | 会议论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/55230 |
Collection | 力学所知识产出(1956-2008) |
Recommended Citation GB/T 7714 | Hu YQ,Zhao YP,Yu TX. Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film[C]2005年纳米和表面科学与技术全国会议论文摘要集,2005. |
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