IMECH-IR  > 力学所知识产出(1956-2008)
Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film
Hu YQ(胡宇群); Zhao YP(赵亚溥); Yu TX(余同希)
Source Publication2005年纳米和表面科学与技术全国会议论文摘要集
2005
Conference Name2005年纳米和表面科学与技术全国会议
Conference Date2005-09-01
Conference Place中国北京
AbstractAnodic bonding,with metal or alloy thin films as an intermediate layer,findsincreasing applications in micro/nano electromechanical systems(MEMS/NEMS).Atthe bonding temperature of 350℃,voltage of 400 V and duration of 30 minutes,theanodic bonding is completed between Pyrex glass and crystalline ...
KeywordAnodic Bonding Dendritic Nanostructures Depletion Layer Dla
Language英语
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/55230
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714
Hu YQ,Zhao YP,Yu TX. Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film[C]2005年纳米和表面科学与技术全国会议论文摘要集,2005.
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