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一种等臂长外差式激光干涉测距系统
李玉琼; 靳刚; 罗子人; 刘河山; 董玉辉
2016-04-13
Rights Holder中国科学院力学研究所
Abstract本发明提供了一种等臂长外差式激光干涉测距系统,至少包括:隔振系统,用于将外界的低频率噪声进行隔离与过滤,消除系统的震动噪声;真空系统,用于降低系统因温度波动所带来的热噪声;光源系统,用于提供2束高稳定性、高稳频的激光,同时这两束光具备相应的差分频率;干涉系统,用于产生两路等臂长外差式干涉信号,利用位移与相位之间的关系,得到被测两物体之间的位移变化信息;相位监测与数据分析系统,用于对干涉信号进行相位检测,对相位信息进行采集,并反演位移,反映干涉系统在各个频段上的测距精度。本发明可消除激光器频率不稳定性、各类噪声源对测距精度的影响,实现了长周期皮米量级的测量精度。
Application Date2013-06-09
Date Available2016-04-13
Patent NumberZL201310231028.1
Language中文
Country中国
Document Type专利
Identifierhttp://dspace.imech.ac.cn/handle/311007/58730
Collection国家微重力实验室
Recommended Citation
GB/T 7714
李玉琼,靳刚,罗子人,等. 一种等臂长外差式激光干涉测距系统. ZL201310231028.1[P]. 2016-04-13.
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