29th International Symposium on Rarefi ed Gas Dynamics (RGD)
JUL 13-18, 2014
Xian, PEOPLES R CHINA
This work aims at exploiting the role of growth temperature on the dynamic behavior of deposition atoms as well as its resultant impact on the composition control during the synthesis of YBa2Cu3O7-delta precursor films by vapor codeposition. The codeposition of Yt, BaF2 and Cu is performed in vacuum chamber under a wide range of growth temperature from 25 degrees C, to 600 degrees C, the mass of each element deposited on LaAlO3 substrate and thus the film composition is examined by the inductively coupled plasma atomic emission spectroscopy. It is shown that the deposition amount of Cu decreases obviously with the increase of growth temperature; however, the mass of Yt and BaF2 deposited on the substrate appears to be insensitive to growth temperature. Moreover, high temperature may also trigger the influence of adsorbates composition on Cu desorption, and therefore the deposition amount of Cu decreases almost linearly as the mol fraction of BaF2 in the adlayers increases. Nevertheless, when the deposition is conducted at room temperature, the influence of mol fraction of BaF2 on Cu desorption vanishes. The detailed mechanisms associated with above phenomena are unveiled by molecular dynamics analysis, additionally the physical picture about adsorption behaviors on the growing interface under different deposition conditions is summarized, which is valuable for handling the composition control during the vapor codeposition of different functional films.
Liu C,Wang LH,Shu YH,et al. Effect of Growth Temperature on Composition Control for Vapor Deposition of YBa2Cu3O7-delta Precursor Films[C]PROCEEDINGS OF THE 29TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS,2014.