Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure

doi:10.1088/1361-6463/aaa55d

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	Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure
	Zhang Y(张吟); Zhao YP(赵亚溥); Cheng ZH
发表期刊	JOURNAL OF PHYSICS D-APPLIED PHYSICS
	2018-02-14
卷号	51 期号:6 页码:65305
ISSN	0022-3727
摘要	The inverse problem of determining three parameters: the film thickness, the film and substrate Young's moduli of a film/substrate bilayer by indentation, is formulated and solved. The physical mechanism for the solvability of the inverse problem is that these three parameters have different impacts at different indentation depth. Their impacts are systematically studied, which also provides a different approach of finding the three parameters or refining their range. Compared with various atomic force microscopy based techniques of detecting subsurface structures, which have to deal with an extremely difficult or even an insurmountable inverse problem with the integral equation of dynamics, the inverse problem here formulated by statics is much more straightforward and simpler. Formulating and solving such an inverse problem can be of some help to the applications such as characterizing subsurface structures, the out-of-plane properties of two-dimensional (2D) materials and various bilayer structures.
关键词	indentation inverse problem bilayer structure subsurface characterization
DOI	10.1088/1361-6463/aaa55d
URL	查看原文
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000423306600001
关键词[WOS]	ATOMIC-FORCE MICROSCOPY ; ELASTIC-MODULUS ; THIN-FILM ; MECHANICAL-PROPERTIES ; ACOUSTIC MICROSCOPY ; CONTACT STIFFNESS ; NANOINDENTATION ; SUBSTRATE ; HARDNESS ; HETEROSTRUCTURES
WOS研究方向	Physics, Applied
WOS类目	Physics
项目资助者	National Natural Science Foundation of China (NSFC) [11372321, 11772335, 21203038] ; Ministry of Science and Technology (MOST) of China [2016YFA0200700]
论文分区	二类
力学所作者排名	1
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/78518
专题	非线性力学国家重点实验室
作者单位	1.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China 3.Renmin Univ China, Dept Phys, Beijing 100872, Peoples R China 4.Renmin Univ China, Beijing Key Lab Optoelect Funct Mat & Micronano D, Beijing 100872, Peoples R China
推荐引用方式 GB/T 7714	Zhang Y,Zhao YP,Cheng ZH. Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2018,51,6,:65305.
APA	张吟,赵亚溥,&Cheng ZH.(2018).Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure.JOURNAL OF PHYSICS D-APPLIED PHYSICS,51(6),65305.
MLA	张吟,et al."Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure".JOURNAL OF PHYSICS D-APPLIED PHYSICS 51.6(2018):65305.

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