IMECH-IR  > 高温气体动力学国家重点实验室
多电子束物理气相沉积系统
舒勇华
Classification研制
2016
Abstract多功能薄膜制备,主要技术指标: 蒸发源最大个数:3个;真空室极限压力:4E-4Pa,基片最大加热温度:600摄氏度
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Identifierhttp://dspace.imech.ac.cn/handle/311007/79615
Collection高温气体动力学国家重点实验室
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GB/T 7714
舒勇华. 多电子束物理气相沉积系统(研制), 2016.
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