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An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate 会议论文
4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN, JUN 11-15, 2007
Authors:  Meng YH(孟永宏);  Chen YY(陈艳艳);  Qi C(齐财);  Liu L(刘丽);  Jin G(靳刚);  Jin G
View  |  Adobe PDF(309Kb)  |  Favorite  |  View/Download：693/162  |  Submit date：2009/07/23
An auto-focusing method for imaging ellipsometry system 会议论文
4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN, JUN 11-15, 2007
Authors:  Meng YH(孟永宏);  Chen S(陈涉);  Jin G(靳刚);  Jin G
View  |  Adobe PDF(281Kb)  |  Favorite  |  View/Download：565/161  |  Submit date：2009/07/23
Optimization of Off-Null Ellipsometry for Optical Biosensor Applications 会议论文
27th Annual International Conference of the IEEE-Engineering-in-Medicine-and-Biology-Society, AUG 31-SEP 03,, Shanghai, PEOPLES R CHINA, 2005
Authors:  Chen YY(陈艳艳);  Meng YH(孟永宏);  Jin G(靳刚);  Jin G(靳刚)
View  |  Adobe PDF(322Kb)  |  Favorite  |  View/Download：548/130  |  Submit date：2007/12/18