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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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宽域飞行工程科学与应... [1]
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夏原 [1]
李光 [1]
李国栋 [1]
许亿 [1]
高方圆 [1]
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2022 [1]
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中国表面工程 [1]
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Indexed By：EI
Language：中文
Funding Organization：国家自然科学基金资助项目(51701229&51871230)
Community：宽域飞行工程科学与应用中心
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HiPIMS室温溅射晶态氧化铝薄膜的粒子能量调控
期刊论文
中国表面工程, 2022, 页码: 8
Authors:
高方圆
;
许亿
;
李国栋
;
李光
;
夏原
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Submit date：2022/10/17
HiPIMS
氧化铝薄膜
室温
晶化诱导
能量调控
