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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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张大成 [1]
张泰华 [1]
杨业敏 [1]
郇勇 [1]
阮勇 [1]
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2005 [1]
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中文 [1]
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机械强度 [1]
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Source Publication：机械强度
Creator：郇勇
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Author：郇勇
Community：力学所知识产出(1956-2008)
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微力学测试仪在MEMS键合强度测试中的应用
期刊论文
机械强度, 2005, 卷号: 27, 期号: 3, 页码: 331-334
Authors:
郇勇
;
张泰华
;
杨业敏
;
阮勇
;
张大成
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Submit date：2007/06/15
微电子机械系统
键合
微悬臂梁
强度
