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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
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Jin G [2]
孟永宏 [2]
靳刚 [2]
刘丽 [1]
陈涉 [1]
陈艳艳 [1]
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2008 [2]
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Source Publication：Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5
Creator：孟永宏
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An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate
会议论文
4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN, JUN 11-15, 2007
Authors:
Meng YH(孟永宏)
;
Chen YY(陈艳艳)
;
Qi C(齐财)
;
Liu L(刘丽)
;
Jin G(靳刚)
;
Jin G
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Adobe PDF(309Kb)
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View/Download：700/167
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Submit date：2009/07/23
An auto-focusing method for imaging ellipsometry system
会议论文
4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN, JUN 11-15, 2007
Authors:
Meng YH(孟永宏)
;
Chen S(陈涉)
;
Jin G(靳刚)
;
Jin G
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|
Adobe PDF(281Kb)
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View/Download：567/162
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Submit date：2009/07/23
