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Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip 期刊论文
Journal of Applied Mechanics-Transactions of the ASME, 2008
Authors:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Adobe PDF(642Kb)  |  Favorite  |  View/Download：1320/361  |  Submit date：2009/08/03
Compressed Elastic Film  Thin-films  Viscous Layer  Wafer Fusion  Stress  Beam  Semiconductors  Technology  Extension  Adhesion  
Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading 期刊论文
Journal of Microelectromechanical Systems, 2007, 卷号: 16, 期号: 3, 页码: 684-693
Authors:  Zhang Y(张吟);  Wang YS;  Li ZH;  Huang YB;  Li DC;  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(490Kb)  |  Favorite  |  View/Download：1109/367  |  Submit date：2009/08/03
Actuators  Beams  Electrostatic Analysis  Modeling  Micromachined Beams  Shallow Arches  Bistable Mems  Microactuator  Parameters  Actuators  Stability  Model