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电子束物理气相沉积钇钛合金薄膜的组分和厚度分布 期刊论文
中国科学. E辑, 技术科学, 2008, 卷号: 38, 期号: 7, 页码: 1105-1117
Authors:  李帅辉;  舒勇华;  樊菁
Adobe PDF(665Kb)  |  Favorite  |  View/Download：821/195  |  Submit date：2010/05/03
电子束物理气相沉积  薄膜  厚度和组分分布  蒸气原子  非平衡输运  
Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition 期刊论文
Science In China Series E-Technological Sciences, 2008, 页码: 1470-1482
Authors:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁);  Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(485Kb)  |  Favorite  |  View/Download：934/257  |  Submit date：2009/08/03
Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Nonequilibrium Transport  Monte-carlo-simulation  Sphere Model  Evaporation