Chinese | English

Search in the results

IMECH-IR
(Note: the search results are based on claimed items)

Browse/Search Results:  1-2 of 2 Help

Filters                
Selected(0)Clear Items/Page:    Sort:
Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
Authors:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Adobe PDF(594Kb)  |  Favorite  |  View/Download：702/166  |  Submit date：2009/08/03
Thin-films  Micromachined Beams  Residual-stress  Cantilever Beam  Stoney Formula  Surface Stress  Strain  Bilayer  Systems  Model  
Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
Authors:  张吟
Adobe PDF(555Kb)  |  Favorite  |  View/Download：547/161  |  Submit date：2007/06/15