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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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先进制造工艺力学实验... [1]
宽域飞行工程科学与应... [1]
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夏原 [2]
李光 [2]
许亿 [2]
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高方圆 [1]
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coatings [1]
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Indexed By:EI
Creator:许亿
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Funding Organization:Strategic Priority Research Program of the Chinese Academy of Sciences
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Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering
期刊论文
APPLIED SURFACE SCIENCE, 2021, 卷号: 564, 页码: 10
Authors:
Xu Y(许亿)
;
Li GD(李国栋)
;
Li G(李光)
;
Gao FY(高方圆)
;
Xia Y(夏原)
Adobe PDF(2620Kb)
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View/Download:1256/154
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Submit date:2021/08/16
High-entropy alloy nitride films
HiPIMS
Bias voltage
Plasma discharge characteristics
Microstructure
Hardness
Effect of Cr Atom Plasma Emission Intensity on the Characteristics of Cr-DLC Films Deposited by Pulsed-DC Magnetron Sputtering
期刊论文
coatings, 2020, 卷号: 10, 期号: 7, 页码: 68
Authors:
Li G(李光)
;
Xu Y(许亿)
;
Xia Y(夏原)
View
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Adobe PDF(1017Kb)
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View/Download:346/81
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Submit date:2020/06/29
diamond-like carbon (DLC)
plasma emission intensity
magnetron sputtering
tribological performance