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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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Chen JA [1]
Ding GF, [1]
Ding W [1]
Wang L [1]
Wang MJ [1]
Yang CS [1]
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Journal ar... [1]
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2004 [1]
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英语 [1]
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Thin Solid... [1]
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SCI [1]
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Indexed By：SCI
Creator：Wang L
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Date Issued：2004
Language：英语
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Measurement of Young’s modulus and residual stress of copper filmelectroplated on silicon wafer
期刊论文
Thin Solid Films, 2004, 卷号: 460, 期号: 1, 页码: 175-180
Authors:
Zhou Y
;
Yang CS
;
Chen JA
;
Ding GF,
;
Ding W
;
Wang L
;
Wang MJ
;
Zhang YM
;
张泰华
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Submit date：2007/06/15
