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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
Creator
丁桂甫 [2]
周勇 [2]
张亚民 [2]
张泰华 [2]
杨春生 [2]
王明军 [2]
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Journal ar... [2]
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2004 [1]
2003 [1]
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中文 [2]
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微细加工技术 [1]
现代科学仪器 [1]
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Creator：丁桂甫
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Creator：王明军
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微桥结构Ni膜杨氏模量和残余应力研究
期刊论文
现代科学仪器, 2004, 期号: 4, 页码: 24-27
Authors:
周勇
;
王明军
;
杨春生
;
陈吉安
;
王莉
;
丁桂甫
;
张亚民
;
高孝裕
;
张泰华
Adobe PDF(549Kb)
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View/Download：685/186
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Submit date：2010/05/03
Ni膜微桥
Mems技术
力学性能
微桥结构镍膜的弹性模量和残余应力研究
期刊论文
微细加工技术, 2003, 期号: 3, 页码: 66-71
Authors:
陈吉安
;
杨春生
;
周勇
;
丁桂甫
;
王莉
;
王明军
;
张亚民
;
张泰华
Adobe PDF(321Kb)
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View/Download：627/179
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Submit date：2010/05/03
Ni膜微桥
Meme技术
力学特性
