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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
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何小元 [2]
康新 [2]
衡伟 [2]
黄庆安 [2]
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Journal ar... [2]
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2001 [2]
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中文 [1]
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机械强度 [2]
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微电子与微电子机械系统(MEMS)中的现代光学测试技术
期刊论文
机械强度, 2001, 卷号: 23, 期号: 4, 页码: 447-451
Authors:
何小元
;
康新
;
衡伟
;
黄庆安
Adobe PDF(452Kb)
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View/Download：469/166
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Submit date：2010/05/03
微电子机械系统
微电子
光测力学
微电子与微机械系统（MEMS）中的现代光学测试技术
期刊论文
机械强度, 2001, 卷号: 23, 期号: 4, 页码: 447-451
Authors:
何小元
;
康新
;
衡伟
;
黄庆安
Adobe PDF(226Kb)
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Favorite
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View/Download：475/129
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Submit date：2007/06/15
