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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
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reprint au... [2]
张吟 [2]
Huang YB [1]
Li DC [1]
Li ZH [1]
Wang YS [1]
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Creator:张吟
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Document Type:期刊论文
Community:力学所知识产出(1956-2008)
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Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip
期刊论文
Journal of Applied Mechanics-Transactions of the ASME, 2008
Authors:
Zhang Y(张吟)
;
Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
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View/Download:1361/371
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Submit date:2009/08/03
Compressed Elastic Film
Thin-films
Viscous Layer
Wafer Fusion
Stress
Beam
Semiconductors
Technology
Extension
Adhesion
Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading
期刊论文
Journal of Microelectromechanical Systems, 2007, 卷号: 16, 期号: 3, 页码: 684-693
Authors:
Zhang Y(张吟)
;
Wang YS
;
Li ZH
;
Huang YB
;
Li DC
;
Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(490Kb)
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View/Download:1123/373
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Submit date:2009/08/03
Actuators
Beams
Electrostatic Analysis
Modeling
Micromachined Beams
Shallow Arches
Bistable Mems
Microactuator
Parameters
Actuators
Stability
Model