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Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum 会议论文
8th Vacuum Metallurgy and Surface Engineering Conference, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:  Li SH(李帅辉);  Shu YH(舒勇华);  Tang JR(唐锦荣);  Fan J(樊菁);  Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
View  |  Adobe PDF(593Kb)  |  Favorite  |  View/Download：351/74  |  Submit date：2016/06/28
真空辐射加热基片的温度分布 期刊论文
力学与实践, 2006, 卷号: 28, 期号: 3, 页码: 19-23
Authors:  李帅辉;  舒勇华;  唐锦荣;  樊菁
Adobe PDF(255Kb)  |  Favorite  |  View/Download：723/236  |  Submit date：2007/06/15
薄膜气相沉积  真空辐射加热  基片温度分布