Rotating compensator sampling for spectroscopic imaging ellipsometry

doi:10.1016/j.tsf.2010.12.131

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	Rotating compensator sampling for spectroscopic imaging ellipsometry
	Meng YH(孟永宏); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
发表期刊	Thin Solid Films
	2011
卷号	519 期号:9 页码:2742-2745
ISSN	0040-6090
摘要	In this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved.
关键词	Rotating Compensator Spectroscopic Imaging Ellipsometry Spectroscopic Ellipsometry Imaging Ellipsometry Ellipsometry Nanofilm Pattern Microellipsometry Design Layers
学科领域	Materials Science ; Physics
DOI	10.1016/j.tsf.2010.12.131
URL	查看原文
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000289174200038
关键词[WOS]	MICROELLIPSOMETRY ; DESIGN ; LAYERS
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
课题组名称	NML纳米生物光学
论文分区	二类/Q2
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/45098
专题	微重力重点实验室
通讯作者	Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Meng YH,Jin G,Jin, G . Rotating compensator sampling for spectroscopic imaging ellipsometry[J]. Thin Solid Films,2011,519,9,:2742-2745.
APA	孟永宏,靳刚,&Jin, G .(2011).Rotating compensator sampling for spectroscopic imaging ellipsometry.Thin Solid Films,519(9),2742-2745.
MLA	孟永宏,et al."Rotating compensator sampling for spectroscopic imaging ellipsometry".Thin Solid Films 519.9(2011):2742-2745.

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