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Rotating compensator sampling for spectroscopic imaging ellipsometry
Meng YH(孟永宏); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
Source PublicationThin Solid Films
2011
Volume519Issue:9Pages:2742-2745
ISSN0040-6090
AbstractIn this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved.
KeywordRotating Compensator Spectroscopic Imaging Ellipsometry Spectroscopic Ellipsometry Imaging Ellipsometry Ellipsometry Nanofilm Pattern Microellipsometry Design Layers
Subject AreaMaterials Science ; Physics
DOI10.1016/j.tsf.2010.12.131
URL查看原文
Indexed BySCI ; EI
Language英语
WOS IDWOS:000289174200038
WOS KeywordMICROELLIPSOMETRY ; DESIGN ; LAYERS
WOS Research AreaMaterials Science ; Physics
WOS SubjectMaterials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
DepartmentNML纳米生物光学
Classification二类/Q2
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/45098
Collection国家微重力实验室
Corresponding AuthorJin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Meng YH,Jin G,Jin, G . Rotating compensator sampling for spectroscopic imaging ellipsometry[J]. Thin Solid Films,2011,519(9):2742-2745.
APA 孟永宏,靳刚,&Jin, G .(2011).Rotating compensator sampling for spectroscopic imaging ellipsometry.Thin Solid Films,519(9),2742-2745.
MLA 孟永宏,et al."Rotating compensator sampling for spectroscopic imaging ellipsometry".Thin Solid Films 519.9(2011):2742-2745.
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