Rotating compensator sampling for spectroscopic imaging ellipsometry

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	Rotating compensator sampling for spectroscopic imaging ellipsometry
	Meng YH(孟永宏); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
会议录名称	THIN SOLID FILMS
	2011
页码	2742-2745
会议名称	5th International Conference on Spectroscopic Ellipsometry
会议日期	MAY 23-29, 2010
会议地点	Albany, NY
摘要	In this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved.
关键词	Rotating Compensator Spectroscopic Imaging Ellipsometry Spectroscopic Ellipsometry Imaging Ellipsometry Ellipsometry Nanofilm Pattern
课题组名称	中科院国家微重力实验室
资助信息	Univ Albany, Coll Nanoscale & Engn
URL	查看原文
收录类别	CPCI（ISTP）
语种	英语
文献类型	会议论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/45326
专题	微重力重点实验室
通讯作者	Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Meng YH,Jin G,Jin, G . Rotating compensator sampling for spectroscopic imaging ellipsometry[C]THIN SOLID FILMS,2011:2742-2745.

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