IMECH-IR  > 国家微重力实验室
Rotating compensator sampling for spectroscopic imaging ellipsometry
Meng YH(孟永宏); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
Source PublicationTHIN SOLID FILMS
2011
Pages2742-2745
Conference Name5th International Conference on Spectroscopic Ellipsometry
Conference DateMAY 23-29, 2010
Conference PlaceAlbany, NY
AbstractIn this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved.
KeywordRotating Compensator Spectroscopic Imaging Ellipsometry Spectroscopic Ellipsometry Imaging Ellipsometry Ellipsometry Nanofilm Pattern
Department中科院国家微重力实验室
Funding OrganizationUniv Albany, Coll Nanoscale & Engn
URL查看原文
Indexed ByCPCI(ISTP)
Language英语
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/45326
Collection国家微重力实验室
Corresponding AuthorJin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Meng YH,Jin G,Jin, G . Rotating compensator sampling for spectroscopic imaging ellipsometry[C]THIN SOLID FILMS,2011:2742-2745.
Files in This Item: Download All
File Name/Size DocType Version Access License
Conf2011-097.pdf(328KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[孟永宏]'s Articles
[靳刚]'s Articles
[Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China]'s Articles
Baidu academic
Similar articles in Baidu academic
[孟永宏]'s Articles
[靳刚]'s Articles
[Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[孟永宏]'s Articles
[靳刚]'s Articles
[Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Conf2011-097.pdf
Format: Adobe PDF
This file does not support browsing at this time
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.