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HiPIMS室温溅射晶态氧化铝薄膜的粒子能量调控 期刊论文
中国表面工程, 2022, 页码: 8
Authors:  高方圆;  许亿;  李国栋;  李光;  夏原
Adobe PDF(1191Kb)  |  Favorite  |  View/Download:254/58  |  Submit date:2022/10/17
HiPIMS  氧化铝薄膜  室温  晶化诱导  能量调控  
Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering 期刊论文
APPLIED SURFACE SCIENCE, 2021, 卷号: 564, 页码: 10
Authors:  Xu Y(许亿);  Li GD(李国栋);  Li G(李光);  Gao FY(高方圆);  Xia Y(夏原)
Adobe PDF(2620Kb)  |  Favorite  |  View/Download:1247/151  |  Submit date:2021/08/16
High-entropy alloy nitride films  HiPIMS  Bias voltage  Plasma discharge characteristics  Microstructure  Hardness