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Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering 期刊论文
APPLIED SURFACE SCIENCE, 2021, 卷号: 564, 页码: 10
Authors:  Xu Y(许亿);  Li GD(李国栋);  Li G(李光);  Gao FY(高方圆);  Xia Y(夏原)
Adobe PDF(2620Kb)  |  Favorite  |  View/Download：1272/158  |  Submit date：2021/08/16
High-entropy alloy nitride films  HiPIMS  Bias voltage  Plasma discharge characteristics  Microstructure  Hardness  
Effect of Cr Atom Plasma Emission Intensity on the Characteristics of Cr-DLC Films Deposited by Pulsed-DC Magnetron Sputtering 期刊论文
coatings, 2020, 卷号: 10, 期号: 7, 页码: 68
Authors:  Li G(李光);  Xu Y(许亿);  Xia Y(夏原)
View  |  Adobe PDF(1017Kb)  |  Favorite  |  View/Download：353/83  |  Submit date：2020/06/29
diamond-like carbon (DLC)  plasma emission intensity  magnetron sputtering  tribological performance  
Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by HiPIMS 期刊论文
Applied Surface Science, 2020, 卷号: 523, 期号: 1, 页码: 146529
Authors:  Xu Y(许亿);  Li G(李光);  Xia Y(夏原)
Adobe PDF(1147Kb)  |  Favorite  |  View/Download：478/144  |  Submit date：2020/05/14
Plasma characteristics and dynamics in a high power pulsed magnetron sputtering discharge 期刊论文
中国科学院大学学报, 2015, 卷号: 32, 期号: 2, 页码: 145-154
Authors:  Xia Y(夏原);  Gao FY(高方圆);  Li G(李光)
Adobe PDF(1949Kb)  |  Favorite  |  View/Download：338/92  |  Submit date：2015/12/25
Hipims  Hppms  等离子体动力学  放电特性  高离化率