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HiPIMS室温溅射晶态氧化铝薄膜的粒子能量调控 期刊论文
中国表面工程, 2022, 页码: 8
Authors:  高方圆;  许亿;  李国栋;  李光;  夏原
Adobe PDF(1191Kb)  |  Favorite  |  View/Download：267/61  |  Submit date：2022/10/17
HiPIMS  氧化铝薄膜  室温  晶化诱导  能量调控  
Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2022, 卷号: 434, 页码: 10
Authors:  Li Hua;  Luo Yang;  Han Mingyue;  Tang Ling;  Gu Jiabin;  Li GD(李国栋);  Deng Dachen;  Liu Hongtao;  Huang Kai;  Li Liuhe
Adobe PDF(7412Kb)  |  Favorite  |  View/Download：224/61  |  Submit date：2022/05/17
HiPIMS  Shadowing effect  Ion dynamics  2D PIC-MCC