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Analysis of Dislocation-Induced Strain Field in an Idealized Wafer-Bonded Microstructure 期刊论文
Journal of Physics D-Applied Physics, 2007, 卷号: 40, 期号: 4, 页码: 1118-1127
Authors:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Adobe PDF(250Kb)  |  Favorite  |  View/Download:683/187  |  Submit date:2007/06/15
Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading 期刊论文
Journal of Microelectromechanical Systems, 2007, 卷号: 16, 期号: 3, 页码: 684-693
Authors:  Zhang Y(张吟);  Wang YS;  Li ZH;  Huang YB;  Li DC;  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(490Kb)  |  Favorite  |  View/Download:1115/370  |  Submit date:2009/08/03
Actuators  Beams  Electrostatic Analysis  Modeling  Micromachined Beams  Shallow Arches  Bistable Mems  Microactuator  Parameters  Actuators  Stability  Model  
Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
Authors:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Adobe PDF(594Kb)  |  Favorite  |  View/Download:710/170  |  Submit date:2009/08/03
Thin-films  Micromachined Beams  Residual-stress  Cantilever Beam  Stoney Formula  Surface Stress  Strain  Bilayer  Systems  Model