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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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潘文霞 [1]
贾军伟 [1]
黄河激 [1]
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2008 [1]
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新技术新工艺 [1]
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Source Publication：新技术新工艺
Date Issued：2008
Language：中文
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中频对靶反应磁控溅射Al_2O_3、TiO_2、ZrO_2功能薄膜的特性研究
期刊论文
新技术新工艺, 2008, 期号: 8, 页码: 101-104+4
Authors:
贾军伟
;
潘文霞
;
黄河激
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Submit date：2010/05/03
功能薄膜
磁控溅射
薄膜电阻
