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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [5]
Creator
张泰华 [5]
杨业敏 [5]
郇勇 [5]
张大成 [1]
曾昭君 [1]
王钻开 [1]
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2005 [1]
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2003 [3]
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中文 [5]
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传感器技术 [1]
传感技术学报 [1]
张泰华;郇勇;杨业敏... [1]
摩擦学学报 [1]
机械强度 [1]
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Creator:郇勇
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Language:中文
Author:杨业敏
Author:张泰华
Community:力学所知识产出(1956-2008)
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微力学测试仪在MEMS键合强度测试中的应用
期刊论文
机械强度, 2005, 卷号: 27, 期号: 3, 页码: 331-334
Authors:
郇勇
;
张泰华
;
杨业敏
;
阮勇
;
张大成
Adobe PDF(190Kb)
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View/Download:1110/392
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Submit date:2007/06/15
微电子机械系统
键合
微悬臂梁
强度
电磁式微加速度计冲击校准装置
专利
发明专利. 电磁式微加速度计冲击校准装置, 专利号: ZL02291092.1, 申请日期: 2002-12-26, 授权日期: 2012-12-28
Inventors:
张泰华
;
郇勇
;
杨业敏
Adobe PDF(325Kb)
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Submit date:2012/12/28
压阻式高量程微加速度计的冲击校准
期刊论文
传感器技术, 2003, 卷号: 22, 期号: 11, 页码: 78-80
Authors:
郇勇
;
张泰华
;
杨业敏
;
王钻开
;
陆德仁
Adobe PDF(164Kb)
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View/Download:756/249
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Submit date:2007/06/15
微电子机械系统
微加速度计
Hopkinson杆
校准
氮化钛沉积膜的摩擦性能研究
期刊论文
摩擦学学报, 2003, 卷号: 23, 期号: 5, 页码: 367-370
Authors:
张泰华
;
郇勇
;
杨业敏
Adobe PDF(234Kb)
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Submit date:2007/06/15
氮化钛薄膜
显微硬度
纳米压痕
纳米划痕
摩擦性能
用Hopkinson杆冲击加载研究高量程微加速度计芯片的抗过载能力
期刊论文
传感技术学报, 2003, 卷号: 16, 期号: 2, 页码: 128-131
Authors:
郇勇
;
张泰华
;
杨业敏
;
曾昭君
Adobe PDF(143Kb)
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Submit date:2007/06/15
微加速度计
Hopkinson
杆
抗过载能力