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Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy 期刊论文
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2005, 卷号: 11, 期号: 2-3, 页码: 97-103
Authors:  Qian J(钱劲);  Yu TX(余同希);  Zhao YP(赵亚溥);  Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China.
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Analysis of residual stress gradient in MEMS multi-layer structure 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2002, 卷号: 3, 期号: 3-4, 页码: 727-730
Authors:  Qian J(钱劲);  Zhao YP(赵亚溥);  Zhu RC(朱如曾);  Qian, J (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Materials selection in mechanical design for microsensors and microactuators 期刊论文
Materials & Design, 2002, 卷号: 23, 期号: 7, 页码: 619-632
Authors:  Qian J(钱劲);  Zhao YP(赵亚溥)
Adobe PDF(586Kb)  |  Favorite  |  View/Download：618/134  |  Submit date：2009/08/03
Microelectromechanical Systems  Materials Selection  Mechanical Design  Performance Index  Microsensors  Microactuators  Functionally Graded Materials  Composites