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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [2]
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贾军伟 [2]
潘文霞 [1]
黄河激 [1]
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Thesis [1]
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2008 [2]
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中文 [2]
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[硕士论文].北京.... [1]
新技术新工艺 [1]
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潘文霞 [1]
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中频对靶反应磁控溅射Al_2O_3、TiO_2、ZrO_2功能薄膜的特性研究
期刊论文
新技术新工艺, 2008, 期号: 8, 页码: 101-104+4
Authors:
贾军伟
;
潘文霞
;
黄河激
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View/Download：551/152
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Submit date：2010/05/03
功能薄膜
磁控溅射
薄膜电阻
中频对靶磁控溅射沉积工艺及薄膜特性研究
学位论文
硕士论文，北京: 中国科学院研究生院, 2008
Authors:
贾军伟
Adobe PDF(2221Kb)
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View/Download：433/6
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Submit date：2009/04/13
