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Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 315-322
作者:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
Adobe PDF(678Kb)  |  收藏  |  浏览/下载:858/150  |  提交时间:2009/08/03
Fractal Pattern  Dla  Anodic Bonding  Aluminum Interlayer  Mems  Diffusion-limited Aggregation  Ion Drift Processes  Borosilicate Glass  Depletion  Films  Si  
Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film 期刊论文
Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing, 2008, 页码: 611-616
作者:  Hu YQ(胡宇泉);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(861Kb)  |  收藏  |  浏览/下载:727/202  |  提交时间:2009/08/03
Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
Tensile Tests Of Micro Anchors Anodically Bonded Between Pyrex Glass And Aluminum Thin Film Coated On Silicon Wafer 期刊论文
Microelectronics Reliability, 2008, 页码: 1720-1723
作者:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
Adobe PDF(340Kb)  |  收藏  |  浏览/下载:813/143  |  提交时间:2009/08/03
On-insulator  Adhesion  
Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film 会议论文
14th International Conference on the Strength of Materials (ICSMA 14), Xian Jiaotong Univ, Xian, PEOPLES R CHINA, JUN 04-09, 2006
作者:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao YP
Adobe PDF(867Kb)  |  收藏  |  浏览/下载:713/192  |  提交时间:2009/07/23
Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
Dendritic nanostructures and pattern formation in anodic bonding of Pyrex glass and crystalline silicon coated with aluminum ultra-thin film 会议论文
2005年纳米和表面科学与技术全国会议, 中国北京, 2005-09-01
作者:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希)
浏览  |  Adobe PDF(54Kb)  |  收藏  |  浏览/下载:193/53  |  提交时间:2015/09/10
Anodic Bonding  Dendritic Nanostructures  Depletion Layer  Dla  
Numerical Analysis of Theoretical Model of the Rf MEMs Switches 期刊论文
Acta Mechanica Sinica, 2004, 卷号: 20, 期号: 2, 页码: 178-184
作者:  Zhang LX(张立宪);  Yu TX(余同希);  Zhao YP(赵亚溥);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
浏览  |  Adobe PDF(479Kb)  |  收藏  |  浏览/下载:454/93  |  提交时间:2007/06/15
MEMS器件的计算机辅助设计与模拟 期刊论文
机械强度, 2001, 卷号: 23, 期号: 4, 页码: 488
作者:  孙克豪;  钱劲;  张立宪;  余同希;  赵亚溥
浏览  |  Adobe PDF(538Kb)  |  收藏  |  浏览/下载:766/224  |  提交时间:2010/05/03
微电子机械系统  计算机辅助设计  模拟  数据库