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Inverse Problems in the MEMS/NEMS Applications 图书章节
2015
作者:  Zhang Y(张吟)
浏览  |  Adobe PDF(276Kb)  |  收藏  |  浏览/下载：146/31  |  提交时间：2018/11/06
Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam 期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 卷号: 21, 期号: 4, 页码: 919-929
作者:  Zhang Y(张吟);  Zhao YP(赵亚溥);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
Adobe PDF(568Kb)  |  收藏  |  浏览/下载：566/214  |  提交时间：2015/04/28
Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
作者:  Zhang Y(张吟);  Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Adobe PDF(594Kb)  |  收藏  |  浏览/下载：690/162  |  提交时间：2009/08/03
Thin-films  Micromachined Beams  Residual-stress  Cantilever Beam  Stoney Formula  Surface Stress  Strain  Bilayer  Systems  Model  
Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications 期刊论文
Journal of Micromechanics and Microengineering, 2007, 卷号: 17, 期号: 4, 页码: 753-762
作者:  张吟
Adobe PDF(555Kb)  |  收藏  |  浏览/下载：531/157  |  提交时间：2007/06/15