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A Breakdown Criterion of Free Molecular Flows and an Optimum Analysis of EBPVD 会议论文
26th International Symposium on Rarefied Gas Dynmaics (RGD26), Kyoto, JAPAN, JUN 20-JUL 25, 2008
作者:  Li SH(李帅辉);  Fan J(樊菁);  Shu YH(舒勇华);  Li SH
Adobe PDF(690Kb)  |  收藏  |  浏览/下载：1006/150  |  提交时间：2009/07/23
Free Molecular Assumption  Breakdown Criterion  Optimization  Thin Film  Ebpvd  Physical Vapor-deposition  Yttrium  
Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition 期刊论文
Science In China Series E-Technological Sciences, 2008, 页码: 1470-1482
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁);  Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(485Kb)  |  收藏  |  浏览/下载：904/253  |  提交时间：2009/08/03
Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Nonequilibrium Transport  Monte-carlo-simulation  Sphere Model  Evaporation  
Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition 会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Fan J(樊菁)
Adobe PDF(756Kb)  |  收藏  |  浏览/下载：234/61  |  提交时间：2016/06/28
Electron Beam Physical Vapor Deposition  Thin Film  Thickness And Species Distributions  Vapor Atom  Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation  Sphere Model  Evaporation  
Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum 会议论文
8th Vacuum Metallurgy and Surface Engineering Conference, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
作者:  Li SH(李帅辉);  Shu YH(舒勇华);  Tang JR(唐锦荣);  Fan J(樊菁);  Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
Adobe PDF(593Kb)  |  收藏  |  浏览/下载：348/74  |  提交时间：2016/06/28